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ЭлегазSulfur HexafluorideElegaz

Refrigerant 14 (Tetrafluoromethane)

Synonyms: Tetrafluoromethane (R14), Carbon fluoride; Freon 14; Perfluoromethane; Carbon tetrafluoride; Halocarbon 14; R 14; PFC 14.

CAS №: 75-73-0

EC №: 200-896-5

Molecular formula: CF4

Tetrafluoromethane, also known as carbon tetrafluoride, is the simplest fluorocarbon (CF4). Halon 14 has very high bond strength due to the nature of the carbon–fluorine bond.

Use

Tetrafluoromethane is used:

• as a low temperature refrigerant;

• in electronics microfabrication alone or in combination with oxygen as a plasma etchant for silicon, silicon dioxide, and silicon nitride;

• in high-voltage equipment production;

• in neutron detectors.

Physical Properties:

Molar mass g/mol 88
Boiling Point  °C -127.8
Melting Point  °C -183.6
Critical pressure MPa 3.74
Vapor Pressure MPa 3.65
Vapor Density g/dm3 3.72
Refractive index   1.00048
Solubility in water, 200C % 0.005
GWP   6300
ODP   0

Specification

Purity 99.99%
Oxygen < 20 ppmv
Moisture < 5 ppmv
Nitrogen < 60 ppmv
Other Halocarbons < 5 ppmv
Carbon Dioxide < 5 ppmv
Carbon Monoxide < 5 ppmv
Acidity (HF) < 0.1 ppm/w

Safety

Depending on the concentration, Refrigerant 14 inhalation can cause headaches, nausea, dizziness and damage to the cardiovascular system (mainly the heart). Long-term exposure can cause severe heart damage. Due to its density, tetrafluoromethane can displace air, creating an asphyxiation hazard in inadequately ventilated areas. But R-14 is a non-flammable and low toxic gas at normal temperature.

Packaging:

• steel cylinder 10 kg,

• steel cylinder 35 kg,

• ISO tank.

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